Journal Publications

2023

Zhang, Xitie, Evren F. Arkan, Coskun Tekes, Tzuhan Wang, F. Levent Degertekin, and Shaolan Li. “A 1.11 mm 2 Guidewire IVUS SoC with±50°-Range Plane Wave Transmit Beamforming.” In ESSCIRC 2023-IEEE 49th European Solid State Circuits Conference (ESSCIRC), pp. 309-312. IEEE, 2023.

Karahasanoglu, Batin, Lee W. Bradley, Helen H. Snyder, Begum Atasoy, Yusuf S. Yaras, and F. Levent Degertekin. “Flexible Stencil-Printed Piezoelectric Transducer Arrays for Catheter Based Ultrasound Applications.” In 2023 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS), pp. 1-4. IEEE, 2023.

Surappa, Sushruta, Charles Wei, Molei Tao, and F. Levent Degertekin. “Generation of Electromechanical Frequency Combs in Fluid Media with a Parametrically Driven Capacitive Microresonator.” Physical Review Applied 19, no. 4 (2023): 044021.

Bradley, Lee W., Yusuf S. Yaras, Batin Karahasanoglu, Begum Atasoy, and F. Levent Degertekin. “Application of Low-Temperature Processed 0–3 Composite Piezoelectric Thick Films in Flexible, Nonplanar, High-Frequency Ultrasonic Devices.” IEEE Sensors Journal 23, no. 7 (2023): 6672-6679.

2022

Lee, Hohyun, Yutong Guo, James L. Ross, Scott Schoen Jr, F. Levent Degertekin, and Costas Arvanitis. “Spatially targeted brain cancer immunotherapy with closed-loop controlled focused ultrasound and immune checkpoint blockade.” Science Advances 8, no. 46 (2022): eadd2288.

Zangabad, Reza Pakdaman, M. Sait Kilinc, Xitie Zhang, Costas D. Arvanitis, and F. Levent Degertekin. “Design of a Transimpedance Amplifier for a Dual Mode CMUT Based Transcranial Ultrasound System.” In 2022 IEEE International Ultrasonics Symposium (IUS), pp. 1-4. IEEE, 2022.

Rezvanitabar, A., Jung, G., Tekes, C., Carpenter, T. M., Cowell, D. M., Freear, S., & Degertekin, F. L. (2022). Integrated hybrid sub-aperture beamforming and time-division multiplexing for massive readout in ultrasound imaging. IEEE Transactions on Biomedical Circuits and Systems16(5), 972-980.

Bradley, Lee W., Yusuf S. Yaras, and F. Levent Degertekin. “Acousto-optic electric field sensor based on thick-film piezoelectric transducer coated fiber Bragg grating.” Optical Fiber Sensors. Optica Publishing Group, 2022.

Rezvanitabar, Ahmad, M. Sait Kilinc, Coskun Tekes, Evren F. Arkan, Maysam Ghovanloo, and F. Levent Degertekin. “An adaptive element-level impedance-matched ASIC with improved acoustic reflectivity for medical ultrasound imaging.” IEEE Transactions on Biomedical Circuits and Systems 16, no. 4 (2022): 492-501.

Schoen Jr, Scott, M. Sait Kilinc, Hohyun Lee, Yutong Guo, F. Levent Degertekin, Graeme F. Woodworth, and Costas Arvanitis. “Towards controlled drug delivery in brain tumors with microbubble-enhanced focused ultrasound.” Advanced drug delivery reviews 180 (2022): 114043.

2021

Surappa, Sushruta, and F. Levent Degertekin. “Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance.” Journal of Microelectromechanical Systems 30.6 (2021): 843-852.

Rezvanitabar, Ahmad, M. Sait Kilinc, Coskun Tekes, Evren F. Arkan, Maysam Ghovanloo, and F. Levent Degertekin. “An Ultrasound Imaging Front-End System-on-a-Chip with Element-Level Impedance Matching for Acoustic Reflectivity Reduction.” In 2021 IEEE Biomedical Circuits and Systems Conference (BioCAS), pp. 01-04. IEEE, 2021.

Tekes, Coskun, Evren F. Arkan, and F. Levent Degertekin. “Optimization of High Frequency CMUT Array Geometry for Guidewire IVUS.” 2021 IEEE International Ultrasonics Symposium (IUS). IEEE, 2021.

Kilinc, M. Sait, et al. “Dual mode CMUT Array Operation for Skull Imaging and Passive Acoustic Monitoring in Transcranial Ultrasound.” 2021 IEEE International Ultrasonics Symposium (IUS). IEEE, 2021.

Rezvanitabar, Ahmad, Evren F. Arkan, and F. Levent Degertekin. “Analysis of Negative Capacitance Based Broadband Impedance Matching for CMUTs.” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (2021).

Yaras, Yusuf S., et al. “Real‐time device tracking under MRI using an acousto‐optic active marker.” Magnetic Resonance in Medicine 85.5 (2021): 2904-2914.

Surappa, Sushruta, Tuna Erdogan, and F. Levent Degertekin. “Multiple electrically tunable parametric resonances in a capacitively coupled electromechanical resonator for broadband energy harvesting.” Smart Materials and Structures 30.4 (2021): 045024.

2020

Rezvanitabar, Ahmad, et al. “A Power-Efficient Bridge Readout Circuit for Implantable, Wearable, and IoT Applications.” IEEE Sensors Journal (2020).

Yaras, Yusuf Samet, et al. “Sensitivity and phase response of FBG based acousto-optic sensors for real-time MRI applications.” OSA Continuum 3.3 (2020): 447-458.

Surappa, Sushruta, and F. Levent Degertekin. “Characterization of a parametric resonance based capacitive ultrasonic transducer in air for acoustic power transfer and sensing.” Sensors and Actuators A: Physical 303 (2020): 111863.

Lim, Jaemyung, et al. “Highly Integrated Guidewire Ultrasound Imaging System-on-a-Chip.” IEEE Journal of Solid-State Circuits (2020).

2019

Tol, S., F. L. Degertekin, and A. Erturk. “3D-printed phononic crystal lens for elastic wave focusing and energy harvesting.” Additive Manufacturing 29 (2019): 100780.

Jung, Gwangrok, et al. “Supply-Inverted Bipolar Pulser and Tx/Rx Switch for CMUTs Above the Process Limit for High Pressure Pulse Generation.” IEEE Sensors Journal 19.24 (2019): 12050-12058.

Pirouz, Amirabbas, and F. Levent Degertekin. “An Analysis Method for Capacitive Micromachined Ultrasound Transducer (CMUT) Energy Conversion during Large Signal Operation.” Sensors 19.4 (2019): 876.

2018

Arkan, Evren Fatih, and F. Levent Degertekin. “Analysis and Design of High-Frequency 1-D CMUT Imaging Arrays in Noncollapsed Mode.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66.2 (2018): 382-393.

Jung, Gwangrok, et al. “A Reduced-Wire ICE Catheter ASIC with Tx Beamforming and Rx Time-Division Multiplexing.” IEEE transactions on biomedical circuits and systems 12.6 (2018): 1246-1255.

Lim, Jaemyung, et al. “An Impulse Radio PWM-Based Wireless Data Acquisition Sensor Interface.” IEEE Sensors Journal 19.2 (2018): 603-614.

Yaras, Yusuf Samet, et al. “Acousto-Optic Catheter Tracking Sensor for Interventional MRI Procedures.” IEEE Transactions on Biomedical Engineering 66.4 (2018): 1148-1154.

Surappa, Sushruta, Molei Tao, and F. Levent Degertekin. “Analysis and Design of Capacitive Parametric Ultrasonic Transducers for Efficient Ultrasonic Power Transfer Based on a 1-D Lumped Model.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 65.11 (2018): 2103-2112.

Pirouz, Amirabbas, and F. Levent Degertekin. “Low temperature CMUT fabrication process with dielectric lift-off membrane support for improved reliability.” Journal of Micromechanics and Microengineering 28.8 (2018): 085006.

Meacham, J. Mark, et al. “Enhanced intracellular delivery via coordinated acoustically driven shear mechanoporation and electrophoretic insertion.” Scientific reports 8.1 (2018): 1-10.

2017

Shieh, Bernard, Karim G. Sabra, and F. Levent Degertekin. “A hybrid boundary element model for simulation and optimization of large piezoelectric micromachined ultrasonic transducer arrays.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 65.1 (2017): 50-59.

Tol, S., F. L. Degertekin, and A. Erturk. “Structurally embedded reflectors and mirrors for elastic wave focusing and energy harvesting.” Journal of Applied Physics 122.16 (2017): 164503.

Surappa Sushruta, Sarp Satir, and F. Levent Degertekin. “A capacitive ultrasonic transducer based on parametric resonance.” Applied Physics Letters 111.4 (2017): 043503.

Tol, S., F. L. Degertekin, and A. Erturk. “Phononic crystal Luneburg lens for omnidirectional elastic wave focusing and energy harvesting.” Applied Physics Letters 111.1 (2017): 013503.

Lim, Jaemyung, et al. “Towards a Reduced-Wire Interface for CMUT-Based Intravascular Ultrasound Imaging Systems.” IEEE transactions on biomedical circuits and systems 11.2 (2017): 400-410.

Jung, Gwangrok, et al. “Supply-Doubled Pulse-Shaping High Voltage Pulser for CMUT Arrays.” IEEE Transactions on Circuits and Systems II: Express Briefs (2017).

Tol, Serife, F. Levent Degertekin, and Alper Erturk. “3D-printed lens for structure-borne wave focusing and energy harvesting.” SPIE Smart Structures and Materials+ Nondestructive Evaluation and Health Monitoring. International Society for Optics and Photonics, 2017.

2016

Shieh, Bernard, Karim G. Sabra, and F. Levent Degertekin. “Efficient Broadband Simulation of Fluid-Structure Coupling for Membrane-Type Acoustic Transducer Arrays Using the Multilevel Fast Multipole Algorithm.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 63.11 (2016): 1967-1979.

Tol, S., F. L. Degertekin, and A. Erturk. “Gradient-index phononic crystal lens-based enhancement of elastic wave energy harvesting.” Applied Physics Letters 109.6 (2016): 063902.

Satir, Sarp, and F. Levent Degertekin. “Phase and amplitude modulation methods for nonlinear ultrasound imaging with CMUTs.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 63.8 (2016): 1086-1092.

Carpenter, Thomas M., et al. “Direct digital demultiplexing of analog TDM signals for cable reduction in ultrasound imaging catheters.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 63.8 (2016): 1078-1085.

Tol, S., F. L. Degertekin, and A. Erturk. “Piezoelectric power extraction from bending waves: Electroelastic modeling, experimental validation, and performance enhancement.” Wave Motion 60 (2016): 20-34.

Lani, Shane, Karim G. Sabra, and F. Levent Degertekin. “Super-resolution ultrasonic imaging of stiffness variations on a microscale active metasurface.” Applied Physics Letters 108.8 (2016): 084104.

2015

Satir, Sarp, and F. Levent Degertekin. “A nonlinear lumped model for ultrasound systems using CMUT arrays.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 62.10 (2015): 1865-1879.

Zhou, Wenchao, et al. “Shape evolution of multiple interacting droplets in inkjet deposition.” Rapid Prototyping Journal 21.4 (2015): 373-385.

Lani, Shane W., Karim Sabra, and F. Levent Degertekin. “Ultrasonic subwavelength focusing above two dimensional membrane metasurface using time reversal.” The Journal of the Acoustical Society of America 137.4 (2015): 2265-2265.

Lani, Shane, Karim G. Sabra, and F. Levent Degertekin. “Modal and transient analysis of membrane acoustic metasurfaces.” Journal of Applied Physics117.4 (2015): 045308.

2014

Xu, Toby, Coskun Tekes, and F. Levent Degertekin. “CMUTs with high-K atomic layer deposition dielectric material insulation layer.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 61.12 (2014): 2121-2131.

Sabra, Karim G., et al. “Passive ultrasonics using sub-Nyquist sampling of high-frequency thermal-mechanical noise.” The Journal of the Acoustical Society of America 135.6 (2014): EL364-EL370.

Lani, Shane, Karim G. Sabra, and F. Levent Degertekin. “Ultrasonic subwavelength focusing above periodic membrane arrays in immersion.” The Journal of the Acoustical Society of America 135.4 (2014): 2222-2222.

Tol, S., F. L. Degertekin, and A. Erturk. “Modeling and enhancement of piezoelectric power extraction from one-dimensional bending waves.” SPIE Smart Structures and Materials+ Nondestructive Evaluation and Health Monitoring. International Society for Optics and Photonics, 2014.

Zhou, Wenchao, et al. “Lattice Boltzmann simulations of multiple-droplet interaction dynamics.” Physical Review E 89.3 (2014): 033311.

Lani, Shane W., et al. “Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.” Applied physics letters 104.5 (2014): 051914.

Gurun, Gokce, et al. “Single-chip CMUT-on-CMOS front-end system for real-time volumetric IVUS and ICE imaging.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 61.2 (2014): 239-250.

Meacham, J. Mark, et al. “Physical methods for intracellular delivery: practical aspects from laboratory use to industrial-scale processing.” Journal of laboratory automation 19.1 (2014): 1-18.

Balantekin, Müjdat, et al. “High-speed tapping-mode atomic force microscopy using a Q-controlled regular cantilever acting as the actuator: Proof-of-principle experiments.” Review of Scientific Instruments 85.12 (2014): 123705.

2013

Satir, Sarp, Jaime Zahorian, and F. Levent Degertekin. “A large-signal model for CMUT arrays with arbitrary membrane geometry operating in non-collapsed mode.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 60.11 (2013): 2426-2439.

Torello, D., and F. Levent Degertekin. “Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities.” Review of Scientific Instruments 84.11 (2013): 113705.

Lani, Shane, et al. “Capacitive micromachined ultrasonic transducers as tunable phononic crystals.” The Journal of the Acoustical Society of America134.5 (2013): 4102-4102.

Zhou, Wenchao, et al. “What controls dynamics of droplet shape evolution upon impingement on a solid surface?.” AIChE Journal 59.8 (2013): 3071-3082.

Parlak, Zehra, and Levent F. Degertekin. “Quantitative subsurface imaging by acoustic AFM techniques.” Acoustic Scanning Probe Microscopy (2013): 417-436.

2012

Torun, Hamdi, Ofer Finkler, and F. Levent Degertekin. “Atomic force microscope based biomolecular force-clamp measurements using a micromachined electrostatic actuator.” Ultramicroscopy 122 (2012): 26-31.

Gurun, Gokce, et al. “An analog integrated circuit beamformer for high-frequency medical ultrasound imaging.” IEEE transactions on biomedical circuits and systems 6.5 (2012): 454-467.

Oral, Hasan Giray, Zehra Parlak, and F. Levent Degertekin. “Analysis of time-resolved interaction force mode AFM imaging using active and passive probes.” Ultramicroscopy 120 (2012): 56-63.

Gurun, Gokce, et al. “Thermal-mechanical-noise-based CMUT characterization and sensing.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59.6 (2012).

Zhou, Wenchao, et al. “Droplet impingement dynamics in ink-jet deposition: A novel measure of droplet shape characterization for the optimization of droplet deposition process is proposed in this paper.” Virtual and Physical Prototyping 7.1 (2012): 49-64.

Satir, Sarp, and F. Levent Degertekin. “Harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59.1 (2012).

2011

Tekes, Coskun, Mustafa Karaman, and F. Levent Degertekin. “Optimizing circular ring arrays for forward-looking IVUS imaging.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 58.12 (2011).

Zahorian, Jaime, et al. “Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 58.12 (2011): 2659-2667.

Lani, Shane, et al. “High frequency ultrasonic imaging using thermal mechanical noise recorded on capacitive micromachined transducer arrays.” Applied Physics Letters 99.22 (2011): 224103.

Lani, Shane, et al. “Ultrasonic sensing using thermal mechanical noise of capacitive micro-machined transducers.” The Journal of the Acoustical Society of America 130.4 (2011): 2426-2426.

Torun, H., D. Torello, and F. L. Degertekin. “Note: Seesaw actuation of atomic force microscope probes for improved imaging bandwidth and displacement range.” Review of Scientific Instruments 82.8 (2011): 086104.

Gurun, Gokce, Paul Hasler, and F. Levent Degertekin. “Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays.” IEEE transactions on ultrasonics, ferroelectrics, and frequency control 58.8 (2011).

Balantekin, M., and F. L. Değertekin. “Optimizing the driving scheme of a self-actuated atomic force microscope probe for high-speed applications.” Ultramicroscopy 111.8 (2011): 1388-1394.

Perng, John Kangchun, et al. “Ultrasound imaging of oxidative stress in vivo with chemically-generated gas microbubbles.” Annals of biomedical engineering (2011): 1-10.

Bicen, Baris, et al. “Electronic enhancement of the directional response of a micromachined biomimetic optical microphone.” The Journal of the Acoustical Society of America 129.4 (2011): 2578-2578.

Forbes, Thomas P., F. Levent Degertekin, and Andrei G. Fedorov. “Droplet charging regimes for ultrasonic atomization of a liquid electrolyte in an external electric field.” Physics of Fluids 23.1 (2011): 012104.

Parlak, Z., and F. L. Degertekin. “Combined quantitative ultrasonic and time-resolved interaction force AFM imaging.” Review of Scientific Instruments82.1 (2011): 013703.

2010

Forbes, Thomas P., F. Levent Degertekin, and Andrei G. Fedorov. “Regime transition in electromechanical fluid atomization and implications to analyte ionization for mass spectrometric analysis.” Journal of the American Society for Mass Spectrometry 21.11 (2010): 1900-1905.

Degertekin, F. Levent, and Hamdi Torun. “Comment on “MEMS-based high speed scanning probe microscopy”[Rev. Sci. Instrum. 81, 043702 (2010)].” Review of Scientific Instruments (2010).

Torun, Hamdi, Krishna K. Sarangapani, and F. Levent Degertekin. “Fabrication and characterization of micromachined active probes with polymer membranes for biomolecular force spectroscopy.” Journal of Microelectromechanical Systems 19.5 (2010): 1021-1028.

Sarangapani, Krishna, et al. “Membrane-based actuation for high-speed single molecule force spectroscopy studies using AFM.” European Biophysics Journal 39.8 (2010): 1219-1227.

Forbes, Thomas P., F. Levent Degertekin, and Andrei G. Fedorov. “Electrochemical ionization and analyte charging in the Array of Micromachined UltraSonic Electrospray (AMUSE) ion source.” Journal of Electroanalytical Chemistry 645.2 (2010): 167-173.

Meacham, J. Mark, et al. “Micromachined ultrasonic print-head for deposition of high-viscosity materials.” Journal of Manufacturing Science and Engineering 132.3 (2010): 030905.

Forbes, Thomas P., F. Levent Degertekin, and Andrei G. Fedorov. “Electrohydrodynamics of charge separation in droplet-based ion sources with time-varying electrical and mechanical actuation.” Journal of the American Society for Mass Spectrometry 21.4 (2010): 501-510.

2009

H. Torun, O. Finkler, and F.L. Degertekin, “Athermalization in atomic force microscope based force spectroscopy using matched microstructure coupling,” Rev. Sci. Inst., 80, 076103, 2009. (Also selected by Virtual Journal of Nanoscale Science & Technology–July 20, 2009, Volume 20, Issue 3).

L. McLeod, F.L. Degertekin, and A. Fedorov, “Determination of the rate-limiting mechanism for permeation of hydrogen through microfabricated palladium-silver alloy membranes,” accepted for publication in J. of Membrane Science, 2009.

T.P. Forbes, R.B. Dixon, D.C. Muddiman, F.L. Degertekin, and A.G. Fedorov, “Characterization of Charge Separation in the Array of Micromachined UltraSonic Electrospray (AMUSE) Ion Source for Mass Spectrometry,” accepted for publication in Journal of the American Society for Mass Spectrometry, 2009.

L. McLeod, F.L. Degertekin, and A. Fedorov, “Non-Ideal Absorption Effects on Hydrogen Permeation through Palladium-Silver Alloy Membranes,” accepted for publication in J. of Membrane Science, 2009.

Z. Parlak, R. Hadizadeh, M. Balantekin, and F.L. Degertekin, “Controlling Tip-Sample Interaction Forces during a Single Tap for Improved Imaging of Soft Materials by Atomic Force Microscopy,” Ultramicroscopy, 109, pp. 1121, 2009.

R.N. Miles, Q. Su, W. Cui, M. Shetye, F.L. Degertekin, B. Bicen, C.Garcia, S. Jones, N. Hall, “A low-noise differential microphone inspired by the ears of the parasitoid fly Ormia ochracea,” J. of Acoust. Soc. Am. (JASA), 125, pp. 2013, 2009.

R.O. Guldiken, J. Zahorian, F.Y. Yamaner, and F. L. Degertekin, “Dual Electrode CMUTs with Non-uniform Membranes for High Electromechanical Coupling Coefficient and High Bandwidth Operation,” IEEE Trans. on UFFC, 56, pp. 1270-6, 2009.

O.G. Karhade, F.L. Degertekin, and T.R. Kurfess, “Active Control of Micro Interferometers for Low Noise Parallel Operation,” accepted for publication in IEEE/ASME Transactions on Mechatronics, 2009.

2008

C. Y. Hampton, C. J. Silvestri, T. P. Forbes, M. J. Varady, J. M. Meacham, A. G. Fedorov, F. L. Degertekin, F. M. Fernández “Comparison of the Internal Energy Deposition of Venturi-Assisted Electrospray Ionization and a Venturi-Assisted Array of Micromachined UltraSonic Electrosprays (AMUSE),” Journal of the American Society for Mass Spectrometry, 19, 1320-9, 2008.

R.O. Guldiken, M. Balantekin, J. Zahorian, and F. L. Degertekin, “Characterization of Dual-Electrode CMUTs: Demonstration of Improved Receive Performance and Pulse Echo Operation with Dynamic Membrane Shaping,” IEEE Trans. on UFFC, 55, pp 2236-45, 2008.

Z. Parlak and F.L. Degertekin, “Contact Stiffness of Finite Size Subsurface Defects for Atomic Force Microscopy: Three-dimensional Finite Element Modeling and Experimental Verification”, J. Appl. Phys., 103, Art. No. 114910, 2008.

N.A. Hall, M. Okandan, R. Littrel, B. Bicen, and F.L. Degertekin, “Simulation of Thin Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), 17, p. 688-97, 2008.

S-.Y. Peng, M. S. Qureshi, P. Hasler, A. Basu, and F. L. Degertekin, “A Floating-gate Based High SNR Low-Power Capacitive Sensing Interface Circuit,” IEEE Trans. on Circuits and Systems I, 55, pp. 1863 – 72, 2008.

O.G. Karhade, F.L. Degertekin, and T.R. Kurfess, “SOI-Based Micro Scanning Grating Interferometer: Device Characterization, Control and Demonstration of Parallel Operation,” J. of Microengineering and Micromechanics, 18, Art. No. 045007, 2008.

M. Balantekin, A.G. Onaran, and F.L. Degertekin, “Quantitative Mechanical Characterization of Materials at the Nanoscale Through Direct Measurement of Time Resolved Tip-sample Interaction Forces,” Nanotechnology, 19, Art. No.: 085704, 2008.

N. A. Hall, M. Okandan, R. Littrell, D. Serkland, G. Keeler, K. Peterson, B. Bicen, C. Garcia, and F. L. Degertekin, “Micromachined Accelerometers with Optical Interferometric Read-out and Integrated Electrostatic Actuation,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), 17, pp. 37-44, 2008.

V. G. Zarnitsyn, J. M. Meacham, M. Varady, C. Hao, F. L. Degertekin, and A.G. Fedorov, “Electrosonic Ejector Microarray for Drug and Gene Delivery,” Biomed. Microdevices, 10, pp. 299-308, 2008.

J.M. Meacham, M. Varady, D. Esposito, F.L. Degertekin, and A.G. Fedorov, “A Micromachined Ultrasonic Atomizer for Liquid Fuels,” Atomization and Sprays, 18, pp. 163-90, 2008.

H. Torun , K.K. Sarangapani and F.L. Degertekin, “Spring Constant Tuning of Active Atomic Force Microscope Probes Using Electrostatic Spring Softening Effect,” Appl. Phys. Lett., 91, 253113, 2007. (Also in Virtual Journal of Nanoscale Science & Technology–January 7, 2008, Volume 17, Issue 1).

2007

C.Y. Hampton, T.P. Forbes, M.J. Varady, J.M. Meacham, A.G. Fedorov, F.L. Degertekin, and F.M. Fernandez, “Analytical Performance of a Venturi-assisted Array of UltraSonic Electrospray (AMUSE) Coupled to Ion Trap Mass Spectroscopy for the Analysis of Proteins and Peptides,” Analytical Chemistry, 79, pp. 8154-8161, 2007.

N. A. Hall, M. Okandan, R. Littrell, B. Bicen, and F.L. Degertekin, “Micromachined Optical Microphone Structures with Low Thermal-mechanical Noise Levels,” J. of Acoust. Soc. Am. (JASA), 122, pp. 2031-2037, 2007.

T.P. Forbes, F.L. Degertekin, and A.G. Fedorov, “Multiplexed Operation of a Micromachined Ultrasonic Droplet Ejector Array,” Review of Scientific Instruments, 78, 104101 2007.

B. Van Gorp, A.G. Onaran, and F.L. Degertekin, “Integrated Dual Grating Method for Extended Range Interferometric Displacement Detection in Probe Microscopy,” Appl. Phys. Lett., 91, 083101, 2007. (Also in Virtual Journal of Nanoscale Science & Technology—September 3, 2007, Volume 16, Issue 10).

M. J. Varady, L. McLeod, J.M. Meacham, F.L Degertekin, and A.G. Fedorov, “Integrated MEMS Infrastructure for Fuel Processing: Hydrogen Generation and Separation for Portable Power Generation,” J. of Microengineering and Micromechanics, (invited, Special Issue on Power MEMS), 17, pp. S257-S264, 2007.

B. Kim, F.L. Degertekin, and T.R. Kurfess, “Micromachined Scanning Grating Interferometer for Out-of-plane Vibration Measurement of MEMS,” J. of Microengineering and Micromechanics, 17, pp. 1888-1898, 2007.

H. Torun, J. Sutanto, K.K. Sarangapani, P. Joseph, F.L. Degertekin, C. Zhu, “Micromachined membrane-based active probe for biomolecular mechanics measurement “, accepted for publication in Nanotechnology, February 2007.

2006

J.M. Meacham, M. Varady, D. Esposito, F.L. Degertekin, and A.G. Fedorov, “A Micromachined Ultrasonic Atomizer for Liquid Fuels,” accepted for publication in Atomization and Sprays, December 2006.

A.F.W. van der Steen, R.A. Baldewsing, F. L. Degertekin, S. Emelianov, M.E. Frijlink, Y. Furukawa, D. Goertz, M. Karaman, B.T. T. Khuri-Yakub, K. Kim, F. Mastik, T. Moriya, Ö. Oralkan, Y. Saijo, J.A. Schaar, P.W. Serruys, S. Sethuraman, A. Tanaka, H.J. Vos, R. Witte, M. O’Donnell, “IVUS beyond the horizon,” Eurointervention, 1 (5), article 23, 2006.

A.G. Fedorov and F.L. Degertekin, “Scanning Mass Spectrometry Probe for Biochemical Imaging,” IEE Electronics Letters, 42, pp. 793-795, 2006.

B.A. Buchine, W.L. Hughes, F.L. Degertekin, and Z.L. Wang, “Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts,” Nano Letters, 6, p. 1155, 2006.

N.A. Hall, M. Okandan, and F.L. Degertekin, “Surface and Bulk Silicon Micromachined Optical Displacement Sensor Fabricated with SwIFT – LiteTM,” IEEE/ASME JMEMS, 15, pp. 770-6, 2006.

A.G. Onaran, M. Balantekin, W. Lee, W.L. Hughes, B.A. Buchine, R.O. Guldiken, Z. Parlak, C.F. Quate and F.L. Degertekin, “A new atomic force microscope probe with force sensing integrated readout and active tip,” Review of Scientific Instruments, 77, 023501 (7 pages), 2006. (Also in Virtual Journal of Nanoscale Science & Technology—February 20, 2006, Volume 13, Issue 7).

F.L. Degertekin, R. O. Guldiken, and M. Karaman, “Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging,” IEEE Trans. on UFFC, 53, pp. 474-82, 2006.

R.O. Guldiken, J. McLean, and F.L. Degertekin, “CMUTs with dual-electrode structure for improved transmit and receive performance,” IEEE Trans. on UFFC, 53, pp. 483-91, 2006.

2005

F. L. Degertekin, A.G. Onaran, M. Balantekin, W. Lee, N.A. Hall, and C.F. Quate, “Sensor for direct measurement of interaction forces in probe microscopy,” Appl. Phys. Lett., 87, 213109, (3 pages), 2005. (Also in Virtual Journal of Nanoscale Science & Technology–November 28, 2005, Volume 12, Issue 22).

N.A. Hall, B. Bicen, W. Lee, K. Jeelani, S. Qureshi , M. Okandan, and F.L. Degertekin, “Micromachined Microphones with Diffraction-Based Optical Displacement Detection,” accepted for publication in J. of Acoust. Soc. Am. (JASA), 2005.

F. Bellan, A. Bulletti, L. Capineri, L. Masotti, G.G. Yaralioglu, F.L. Degertekin, B.T. Khuri-Yakub, F. Guasti, and E. Rosi, “A new design and manufacturing process for embedded Lamb waves interdigital transducers based on piezopolymer film,” Sensors and Actuators A-Physical, 123-24, pp. 379-387, 2005.

A.G. Onaran and F.L. Degertekin, “A fluid cell with integrated acoustic radiation pressure actuator for atomic force microscopy”, Rev. Sci. Instr., 76, 103703, (6 pages) 2005. (Also in Virtual Journal of Nanoscale Science & Technology–October 24, 2005, Volume 12, Issue 17).

J.M. Meacham, M. Varady, F.L. Degertekin, and A.G. Fedorov, “Droplet formation and ejection from a micromachined ultrasonic droplet generator: visualization and scaling,” Physics of Fluids, 17, 100605-1-8, 2005.

S. Aderogba, J. M. Meacham, F.L. Degertekin, A.G. Fedorov, and F. M. Fernandez, “Nanoelectrospray ion generation for high throughput mass spectrometry using a micromachined ultrasonic ejector array,” Appl. Phys. Lett., 86, 203110, 2005. (Also in Virtual Journal of Nanoscale Science & Technology–May 23, 2005, Volume 11, Issue 20).

2004

B. Kim, M. Schmidtdiel, F.L. Degertekin, and T. R. Kurfess, “Scanning grating microinterferometer for MEMS metrology,” ASME J. Manufacturing Science and Engineering, 126, pp. 807-812, 2004.

W. Lee, N.A. Hall and F.L. Degertekin, “A Grating-assisted Resonant-cavity-enhanced Optical Displacement Detection Method for Micromachined Sensors,” Appl. Phys. Lett., 85, pp. 3032-34, 2004. (Also in Virtual Journal of Nanoscale Science & Technology—November 1, 2004 Volume 10, Issue 18).

J. Knight, J. McLean, and F.L. Degertekin, “Low Temperature Fabrication of Immersion Capacitive Micromachined Ultrasonic Transducers on Silicon and Dielectric Substrates,” IEEE Trans. on UFFC, 51, pp. 1324-33, 2004 (IEEE UFFC Society 2004 Outstanding Paper Award).

W. Lee and F.L. Degertekin, “Rigorous Coupled-wave Analysis of Multilayered Grating Structures,” IEEE Journal of Lightwave Technology, 22, pp. 2359-63, 2004.

F. Sarioglu, A. Atalar, and F.L. Degertekin, “Modeling the Effect of Subsurface Interface Defects on Contact Stiffness for Ultrasonic Atomic Force Microscopy,” Appl. Phys. Lett., 84, pp. 5368-5370, 2004.

W. Lee, N. A. Hall, Z. Zhou, and F. L. Degertekin, “Fabrication and Characterization of a Micromachined Acoustic Sensor with Integrated Optical Readout,” IEEE J. Selected Topics on Quantum Electronics, 10, pp. 643-51, 2004.

J. McLean and F.L. Degertekin, “Directional Scholte Wave Generation and Detection Using Interdigital Capacitive Micromachined Ultrasonic Transducers,” IEEE Trans. on UFFC, 51, pp. 756-64, 2004.

J. M. Meacham, C. Ejimofor, S. Kumar, F. L. Degertekin, and A. G. Fedorov, “A Micromachined Ultrasonic Droplet Generator Based on a Liquid Horn Structure,” Review of Scientific Instruments, 75, pp. 1347-1352, 2004. (Also in Virtual Journal of Nanoscale Science & Technology–May 10, 2004 Volume 9, Issue 18).

2003

N.A. Hall, W. Lee and F. L. Degertekin, “Capacitive Micromachined Ultrasonic Transducers with Diffraction–based Integrated Optical Displacement Detection,” IEEE Trans. on UFFC, 50, pp. 1570-80, 2003.

2002

A.G. Onaran, F.L. Degertekin and B. Hadimioglu, “Tapping Mode and Elasticity Imaging in Liquids Using an Atomic Force Microscope Actuated by Acoustic Radiation Pressure,” Appl. Phys. Lett., 80, pp.4063-5, 2002.

N.A. Hall and F.L. Degertekin, “An Integrated Optical Interferometric Detection Method for Micromachined Capacitive Acoustic Transducers,” Appl. Phys. Lett., 80, pp. 3859-61 2002. (Also in Virtual Journal of Nanoscale Science & Technology–May 27, 2002 Volume 5, Issue 21).

2001

F.L. Degertekin, B. Hadimioglu, T. Sulchek, and C.F. Quate, “Actuation and Characterization of Atomic Force Microscope Cantilevers in fluids by Acoustic Radiation Pressure,” Appl. Phys. Lett., 78, pp. 1628-30, 2001.

X.C. Jin, O. Oralkan, F.L. Degertekin and B.T. Khuri-Yakub, “Characterization of a 1-D Capacitive Micromachined Ultrasonic Immersion Transducer Array,” IEEE Trans. on UFFC, 48, pp. 750-61, 2001.

G.G. Yaralioglu, M.H. Badi, A.S. Ergun, F.L. Degertekin, C-H Cheng and B.T. Khuri-Yakub, “Lamb Wave Devices Using Capacitive Micromachined Ultrasonic Transducers,” Appl. Phys. Lett., 78, pp. 111-3, 2001.

2000

B.T. Khuri-Yakub, C-H Cheng, F.L. Degertekin, S. Ergun, S. Hansen, X.C. Jin and O. Oralkan, “Silicon Micromachined Ultrasonic Transducers,” Jpn. J. Appl. Phys., 39-1, pp. 2883-7, 2000.

K.B. Crozier, G.G. Yaralioglu, F.L. Degertekin, J.D. Adams, S.C. Minne, and C.F. Quate, “Thin Film Characterization by Atomic Force Microscopy at Ultrasonic Frequencies,” Appl. Phys. Lett., 76,pp. 1950-2, 2000.

G.G. Yaralioglu, F.L.Degertekin, K.B. Crozier and C.F. Quate, “Contact Stiffness of Layered Materials for Ultrasonic Atomic Force Microscopy,” J. Appl. Phys., 87, pp.7491-6, 2000.

1999

O. Oralkan, X.C. Jin. F.L. Degertekin and B.T. Khuri-Yakub, “Simulation and Experimental Characterization of a 2-D Capacitive Micromachined Ultrasonic Transducer Array Element,” IEEE Trans. on UFFC, 46, pp. 1337-9, 1999.

S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, “Ultrasonic Sensor for Photoresist Process Monitoring,” IEEE Trans. Semicon. Man. , 12, pp. 332-40, 1999.

X.C. Jin, I. Ladabaum, F.L. Degertekin, S. Calmes and B.T. Khuri-Yakub, “Fabrication and Characterization of Surface Micromachined Capacitive Ultrasonic Immersion Transducers,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), 8, pp. 100-114, 1999.

1998

S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, “In-situ Ultrasonic Monitoring of Photoresist Development,” Appl. Phys. Lett., 73, pp. 2215-7, 1998.

F.L. Degertekin, A. Atalar, B.T. Khuri-Yakub, “Micromachinable Ultrasonic Leaky Wave Air Transducers,” Appl Phys. Lett., 73, pp. 741-3, 1998.

G. Percin, A. Atalar, F.L. Degertekin, and B.T. Khuri-Yakub, “Micromachined Two Dimensional Array Piezoelectrically Actuated Transducers,” Appl. Phys. Lett., 72, pp.1337-39, 1998.
S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, “In Situ Ultrasonic Measurement of Photoresist Glass Transition Temperature,” Appl. Phys. Lett, 72, pp. 2457-9, 1998.

1997

F.L. Degertekin and B.T. Khuri-Yakub, “Lamb Wave Excitation by Hertzian Contacts with Applications NDE,” IEEE Trans. on UFFC, 44, pp. 769-79, 1997.

V. Subramanian, F.L. Degertekin, P. Dankoski, B.T. Khuri-Yakub and K.C. Saraswat, “In-situ Monitoring of Crystallinity and Temperature during Rapid Thermal Crystalization of Si on Glass/Quartz using an Acoustic Sensor,” J. of Electrochem. Soc., 144, pp.2216-20, 1997.

V. Subramanian, P. Dankoski, F.L. Degertekin, B.T. Khuri-Yakub and K.C. Saraswat, “Controlled Two-step Solid-Phase Crystallization for High Performance Polysilicon TFTs,” IEEE Electron Device Lett., 18, 378-81, 1997.

1996

F.L. Degertekin and B.T. Khuri-Yakub, “Single Mode Lamb Wave Excitation in Thin Plates by Hertzian Contacts” Appl. Phys. Lett., 69, 146-8, 1996.

J.Pei, M.I. Yousuf, F.L. Degertekin, B.T. Khuri-Yakub and B.V. Honein, “Lamb Wave Tomography and It’s Application in Pipe Erosion/Corrosion Monitoring,” Research in NDE, 8, pp. 189-97, 1996.

F.L. Degertekin and B.T. Khuri-Yakub, “Hertzian Contact Transducers for Nondestructive Evaluation,” J. of Acoust. Soc. Am. (JASA), 97, pp. 299-309, 1996

1995

J. Pei, F.L. Degertekin, B.T. Khuri-Yakub and K.C. Saraswat, “In-situ Thin Film Thickness Measurement with Acoustic Lamb Waves,” Appl. Phys. Lett., 66, pp. 2177-9, 1995

1994

F.L Degertekin, J. Pei, B.T.Khuri-Yakub and K.C. Saraswat,” In-situ Acoustic Temperature Tomography of Semiconductor Wafers,” Appl. Phys. Lett., 64, pp. 1338-40, 1994

K.C. Saraswat el al., “Rapid Thermal Multiprocessing for a Programmable Factory for Adaptable Manufacturing of ICs,” IEEE Trans on Semicond. Man. , 7, pp. 159-75, 1994

1992

A. Atalar, H. Koymen and F.L. Degertekin, “A Lamb Wave Lens for Acoustic Microscopy,” IEEE Trans. on UFFC, 39, pp. 661-7, 1992.